New Piezo Scanner from PI: Small footprint with large aperture

This XY nanopositioning system with 70 mm side length features a large 30 mm x 30 mm clear aperture and is suited for sample handling and positioning as well as for transmitted-light applications.

The P-763 is equipped with PICMA® actuators for high reliability, capacitive sensors for high position stability and high resolution, as well as frictionless flexure joints. With these technical features, the P-763 achieves a 200 µm travel range per axis with a non-linearity of 0.02% and a resolution below 1 nm.

The resonant frequency of 180 Hz achieved at this long 200 µm travel range is high and allows for a large dynamic bandwidth of the positioning system. For attaining the system's elevated stiffness, PICMA® actuators with a large footprint were selected. For a highly dynamic, nanometer-precise operation the P-763 is suited for control with the powerful E-709.CHG digital controller.

Source: Physik Instrumente (PI) GmbH & Co. KG

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